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タイトル: Sensitivity Enhancement of Laser Absorption Spectroscopy for Atomic Oxygen Measurement in Microwave Air Plasma
著者: Matsui, Makoto
Komurasaki, Kimiya
Arakawa, Yoshihiro
キーワード: Atomic Oxygen
Air Plasma
Microwave Plasma
High Sensitive Laser Absorption Spectroscopy
発行日: 2008年9月
出版者: Pergamon Press
掲載誌情報: Vacuum. Vol.83, Iss.1-4, 2008-09, pp. 21-24
抄録: A high sensitive laser absorption spectroscopy system has been developed for the detection of atomic oxygen in a microwave plasma. Firstly, the sensitivity of this system was evaluated by ring-down time measurement. The effective absorbing pass length was extended up to 640 times as long as that of the conventional laser absorption spectroscopy. Then, the system was applied to the air plasma diagnostics. As a result, the absorption signal from the meta-stable atomic oxygen at 777.19 nm could be observed at the input enthalpy range from 0.93 MJ/kg to 467 MJ/kg. The detected minimum number density was 1.6×1011 m-3 with temperature of 388 K, which correspond to the center fractional absorption of 1.4×10-2 % in the LAS
URI: http://hdl.handle.net/2261/32486
ISSN: 0042207X
出現カテゴリ:014 自然科学
1131810 学術雑誌論文


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