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Growth and characterization of scandate insulator films for oxide field-effect devices
http://hdl.handle.net/2261/9202
http://hdl.handle.net/2261/9202182bd731-57a4-4870-b915-933e1a9a21b1
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本文(fulltext) (8.1 MB)
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本文(fulltext) (4.8 MB)
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要旨(summary) (182.2 kB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2011-08-08 | |||||
タイトル | ||||||
タイトル | Growth and characterization of scandate insulator films for oxide field-effect devices | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_46ec | |||||
タイプ | thesis | |||||
その他のタイトル | ||||||
その他のタイトル | 酸化物電界効果デバイス作製に向けたスカンジウム酸化物絶縁膜の成長と評価 | |||||
著者 |
Uozumi, Takayuki
× Uozumi, Takayuki |
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著者別名 | ||||||
識別子 | 4164 | |||||
識別子Scheme | WEKO | |||||
姓名 | 魚住, 崇之 | |||||
著者所属 | ||||||
著者所属 | 東京大学大学院新領域創成科学研究科 基盤科学研究系 物質系専攻 | |||||
書誌情報 | 発行日 2006-03-23 | |||||
日本十進分類法 | ||||||
主題 | 400 | |||||
主題Scheme | NDC | |||||
学位名 | ||||||
学位名 | 修士(科学) | |||||
学位 | ||||||
値 | master | |||||
研究科・専攻 | ||||||
新領域創成科学研究科物質系専攻 | ||||||
学位授与年月日 | ||||||
学位授与年月日 | 2006-03-23 | |||||
学位記番号 | ||||||
修創域第1568号 |