WEKO3
アイテム
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特集2 : 研究解説 : Integrated Optics on Silicon : A MEMS Compatibility
http://hdl.handle.net/2261/53223
http://hdl.handle.net/2261/532230a7af100-6d2a-4ab9-805d-6f7301169e02
名前 / ファイル | ライセンス | アクション |
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sk049012002.pdf (863.6 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-02-15 | |||||
タイトル | ||||||
タイトル | 特集2 : 研究解説 : Integrated Optics on Silicon : A MEMS Compatibility | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | Integrated optics | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Micro-interferometry | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Surface-acoustic waves | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | Si-based machining | |||||
主題Scheme | Other | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | シリコンインテグレーテイドオプティクス | |||||
著者 |
Bonnotte, Eric
× Bonnotte, Eric× Gorecki, Christophe× Toshiyoshi, Hiroshi× Fujita, Hiroyuki× Kawakatsu, Hideki |
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著者別名 | ||||||
識別子 | 30490 | |||||
識別子Scheme | WEKO | |||||
姓名 | ボノット, エリック | |||||
著者別名 | ||||||
識別子 | 30491 | |||||
識別子Scheme | WEKO | |||||
姓名 | ゴレキ, クリストフ | |||||
著者別名 | ||||||
識別子 | 30492 | |||||
識別子Scheme | WEKO | |||||
姓名 | 年吉, 洋 | |||||
著者別名 | ||||||
識別子 | 30493 | |||||
識別子Scheme | WEKO | |||||
姓名 | 藤田, 博之 | |||||
著者別名 | ||||||
識別子 | 30494 | |||||
識別子Scheme | WEKO | |||||
姓名 | 川勝, 英樹 | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 機械工学 | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 光学 | |||||
著者所属 | ||||||
著者所属 | 3rd Department, Institute of Industrial Science, University of Tokyo 電気工学 | |||||
著者所属 | ||||||
著者所属 | 3rd Department, Institute of Industrial Science, University of Tokyo マイクロメカトロニクス | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, University of Tokyo 精密工学 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | After a short review of integrated optics, a novel application of Si-based integrated optics and preliminary results of realisation of a compact Mach-Zehnder interferometer will be presented. The deposition of a piezoelectric ZnO thin-film transducer on the reference arm of the interferometer will allow to transform this optically passive device into a device under an active phase modulation, useful to built a high-resolution microsensing systems with optical heterodyning. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 小特集 マイクロマシン | |||||
書誌情報 |
生産研究 巻 49, 号 12, p. 604-608, 発行日 1997-12 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0037105X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00127075 | |||||
日本十進分類法 | ||||||
主題 | 549 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | 東京大学生産技術研究所 | |||||
出版者別名 | ||||||
Institute of Industrial Science, the University of Tokyo |