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特集17 : 研究速報 : Two Dimensional Positioning Control using a Crystal as the Reference
http://hdl.handle.net/2261/53191
http://hdl.handle.net/2261/531917e1652b0-801a-41bc-ac05-f2a42f8566e9
名前 / ファイル | ライセンス | アクション |
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sk049009017.pdf (231.2 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2013-02-13 | |||||
タイトル | ||||||
タイトル | 特集17 : 研究速報 : Two Dimensional Positioning Control using a Crystal as the Reference | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_6501 | |||||
タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | 結晶を基準に用いた2次元位置決め制御 | |||||
著者 |
Kawakatsu, Hideki
× Kawakatsu, Hideki× Rochat, Eric |
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著者別名 | ||||||
識別子 | 30752 | |||||
識別子Scheme | WEKO | |||||
姓名 | 川勝, 英樹 | |||||
著者別名 | ||||||
識別子 | 30753 | |||||
識別子Scheme | WEKO | |||||
姓名 | ロシャ, エリック | |||||
著者所属 | ||||||
著者所属 | 2nd Department, Institute of Industrial Science, Universiry of Tokyo 精密工学 | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 特集 先進プロダクションテクノロジー | |||||
書誌情報 |
生産研究 巻 49, 号 9, p. 450-451, 発行日 1997-09 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0037105X | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00127075 | |||||
日本十進分類法 | ||||||
主題 | 549 | |||||
主題Scheme | NDC | |||||
出版者 | ||||||
出版者 | 東京大学生産技術研究所 | |||||
出版者別名 | ||||||
Institute of Industrial Science, the University of Tokyo |