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Combinatorial masked deposition: Simple method to control deposition flux and its spatial distribution

Noda Suguru , Kajikawa Yuya , Komiyama Hiroshi
Applied surface science : a journal devoted to the properties of interfaces in relation to the synthesis and behaviour of materials,225(1-4),372-379 (2004-03-30)

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Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

Li Tu-Qiang , Noda Suguru , Okada Fumio , Komiyama Hiroshi
Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena,21(6),2512-2516 (2003-11)

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Structural and morphological control of nanosized Cu islands on SiO2 using a Ti underlayer

Hu Minghui , Noda Suguru , Okubo Tatsuya , Yamaguchi Yukio , Komiyama Hiroshi
Journal of applied physics,94(5),3492-3497 (2003-09-01)

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Initial growth stage of nanoscaled TiN films: Formation of continuous amorphous layers and thickness-dependent crystal nucleation

Li Tu-Qiang , Noda Suguru , Komiyama Hiroshi , Yamamoto Takahisa , Ikuhara Yuichi
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society,21(5),1717-1723 (2003-09)

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Amorphous-to-crystalline transition during the early stages of thin film growth of Cr on SiO2

Hu Minghui , Noda Suguru , Hiroshi Komiyama
Journal of applied physics,93(11),9336-9344 (2003-06-01)

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A new insight into the growth mode of metals on TiO2(110)

Hu Minghui , Noda Suguru , Komiyama Hiroshi
Surface science,513(3),530-538 (2002-08-01)

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Initial growth and texture formation during reactive magnetron sputtering of TiN on Si(111)

Li Tu-Qiang , Noda Suguru , Tsuji Yoshiko , Ohsawa Toshio , Komiyama Hiroshi
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society,20(3),583-588 (2002-05)

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Effect of interfacial interactions on the initial growth of Cu on clean SiO2 and 3-mercaptopropyltrimethoxysilane-modified SiO2 substrates

Hu Minghui , Noda Suguru , Tsuji Yoshiko , Okubo Tatsuya , Yamaguchi Yukio , Komiyama Hiroshi
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society,20(3),589-596 (2002-05)

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Structure and morphology of self-assembled 3-mercaptopropyltrimethoxysilane layers on silicon oxide

Hu Minghui , Noda Suguru , Okubo Tatsuya , Yamaguchi Yukio , Komiyama Hiroshi
Applied surface science : a journal devoted to the properties of interfaces in relation to the synthesis and behaviour of materials,181(3-4),307-316 (2001-09-21)

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