2024-03-29T02:38:17Z
https://repository.dl.itc.u-tokyo.ac.jp/oai
oai:repository.dl.itc.u-tokyo.ac.jp:00000010
2022-12-19T03:40:55Z
6:7:8
9:10:11
Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms
Li, Tu-Qiang
Noda, Suguru
Okada, Fumio
Komiyama, Hiroshi
431.86
Titanium nitride
Nanofilms
Nanostructured materials
Thin films
Epitaxial growth
Interfacial energy
Crystal orientation
application/pdf
American Institute of Physics
2003-11
eng
journal article
http://hdl.handle.net/2261/18
https://repository.dl.itc.u-tokyo.ac.jp/records/10
AA10804928
0734211X
Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
21
6
2512
2516
https://repository.dl.itc.u-tokyo.ac.jp/record/10/files/2003JVSTB_li.pdf
application/pdf
1.1 MB
2017-05-30