2024-03-29T07:07:49Z
https://repository.dl.itc.u-tokyo.ac.jp/oai
oai:repository.dl.itc.u-tokyo.ac.jp:00017929
2022-12-19T03:56:53Z
171:1108:1140:1150
9:504:1111:1142:1151
研究解説 : GaN and Related Compounds for MEMS and MOEMS
Krawczyk, Stanislas K.
Someya, Takao
Arakawa, Yasuhiko
Fujita, Hiroyuki
東京大学生産技術研究所
1999-08
eng
departmental bulletin paper
http://hdl.handle.net/2261/54981
https://repository.dl.itc.u-tokyo.ac.jp/records/17929
AN00127075
0037105X
生産研究
51
8
622
625
https://repository.dl.itc.u-tokyo.ac.jp/record/17929/files/sk051008002.pdf
application/pdf
707.3 kB
2017-06-08