2024-03-29T02:35:17Z
https://repository.dl.itc.u-tokyo.ac.jp/oai
oai:repository.dl.itc.u-tokyo.ac.jp:00019580
2022-12-19T03:58:24Z
171:1108:1422:1430
9:504:1111:1424:1431
研究速報 : RELATIONSHIP BETWEEN OPTICAL DAMAGE THRESHOLD AND RESIDUAL ABSORPTION IN EXCIMER LASER COMPONENTS
エキシマレーザー用光学素子の光損傷しきい値と残存吸収の関係
ITOH, Masahide
ENDO, Akira
KURODA, Kazuo
WATANABE, Shuntaro
OGURA, Iwao
530
東京大学生産技術研究所
1988-09-01
eng
departmental bulletin paper
http://hdl.handle.net/2261/40079
https://repository.dl.itc.u-tokyo.ac.jp/records/19580
AN00127075
0037105X
生産研究
40
9
433
436
https://repository.dl.itc.u-tokyo.ac.jp/record/19580/files/sk040009006.pdf
application/pdf
231.3 kB
2017-06-08