@article{oai:repository.dl.itc.u-tokyo.ac.jp:00000010,
 author = {Li, Tu-Qiang and Noda, Suguru and Okada, Fumio and Komiyama, Hiroshi},
 issue = {6},
 journal = {Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena},
 month = {Nov},
 note = {application/pdf},
 pages = {2512--2516},
 title = {Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms},
 volume = {21},
 year = {2003}
}