@article{oai:repository.dl.itc.u-tokyo.ac.jp:00000011,
 author = {Li, Tu-Qiang and Noda, Suguru and Tsuji, Yoshiko and Ohsawa, Toshio and Komiyama, Hiroshi},
 issue = {3},
 journal = {Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society},
 month = {May},
 note = {application/pdf},
 pages = {583--588},
 title = {Initial growth and texture formation during reactive magnetron sputtering of TiN on Si(111)},
 volume = {20},
 year = {2002}
}