@article{oai:repository.dl.itc.u-tokyo.ac.jp:00000012,
 author = {Li, Tu-Qiang and Noda, Suguru and Komiyama, Hiroshi and Yamamoto, Takahisa and Ikuhara, Yuichi},
 issue = {5},
 journal = {Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society},
 month = {Sep},
 note = {application/pdf},
 pages = {1717--1723},
 title = {Initial growth stage of nanoscaled TiN films: Formation of continuous amorphous layers and thickness-dependent crystal nucleation},
 volume = {21},
 year = {2003}
}