@article{oai:repository.dl.itc.u-tokyo.ac.jp:00017832,
 author = {Ducrée, Jens and Sandmaiser, Hermann and Lang, Walter},
 issue = {6},
 journal = {生産研究},
 month = {Jun},
 note = {第13回生研学術講演会"マイクロマシン : 基盤技術の充実と応用の展開の現状"},
 pages = {282--285},
 title = {セッション3 : MEMS : From Development of Production},
 volume = {52},
 year = {2000}
}