@article{oai:repository.dl.itc.u-tokyo.ac.jp:00017929,
 author = {Krawczyk, Stanislas K. and Someya, Takao and Arakawa, Yasuhiko and Fujita, Hiroyuki},
 issue = {8},
 journal = {生産研究},
 month = {Aug},
 pages = {622--625},
 title = {研究解説 : GaN and Related Compounds for MEMS and MOEMS},
 volume = {51},
 year = {1999}
}