@article{oai:repository.dl.itc.u-tokyo.ac.jp:00017936, author = {Minotti, Patrice and Langlet, Philippe and Bourbon, Gilles and Helin, Phillipe and Masuzawa, Takahisa and Fujita, Hiroyuki}, issue = {8}, journal = {生産研究}, month = {Aug}, pages = {644--646}, title = {研究速報 : Design and Chartacterization of High-Torque Silicon Based Electrostatic Micromotors}, volume = {51}, year = {1999} }