{"created":"2021-03-01T06:35:33.146562+00:00","id":18176,"links":{},"metadata":{"_buckets":{"deposit":"40d93b17-1c05-483c-8cc4-e5c8d08a481e"},"_deposit":{"id":"18176","owners":[],"pid":{"revision_id":0,"type":"depid","value":"18176"},"status":"published"},"_oai":{"id":"oai:repository.dl.itc.u-tokyo.ac.jp:00018176","sets":["171:1108:1192:1193","9:504:1111:1194:1195"]},"item_4_alternative_title_1":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Fabrication Technologies for High-Aspect-Ratio Microstructures"}]},"item_4_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1997-12","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"12","bibliographicPageEnd":"603","bibliographicPageStart":"599","bibliographicVolumeNumber":"49","bibliographic_titles":[{"bibliographic_title":"生産研究"}]}]},"item_4_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"半導体製造技術を援用してミクロの機械を作るマイクロマシニング技術が発達しており, マイクロマシンの実用化が期待されている。応用分野によっては, 厚くて頑丈な構造や三次元的に複雑な構造が要求される場合があるため, 様々のプロセスを開発し, 三次元的なマイクロ構造を作る研究が盛んに行われている。三次元的な微細パターンの型取りでマイクロ構造を作る方法, シリコンの薄膜を基板から折り上げて立体化する方法, ビーム加工やマイクロ機械加工による方法などを紹介する。","subitem_description_type":"Abstract"}]},"item_4_description_6":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"小特集 マイクロマシン","subitem_description_type":"Other"}]},"item_4_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"30484","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Fujita, Hiroyuki"}]}]},"item_4_publisher_20":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"東京大学生産技術研究所"}]},"item_4_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00127075","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0037105X","subitem_source_identifier_type":"ISSN"}]},"item_4_subject_15":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"530","subitem_subject_scheme":"NDC"}]},"item_4_text_21":{"attribute_name":"出版者別名","attribute_value_mlt":[{"subitem_text_value":"Institute of Industrial Science, the University of Tokyo"}]},"item_4_text_4":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東京大学生産技術研究所第3部 マイクロメカトロニクス"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"藤田, 博之"}],"nameIdentifiers":[{"nameIdentifier":"30483","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-06-08"}],"displaytype":"detail","filename":"sk049012001.pdf","filesize":[{"value":"811.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"sk049012001.pdf","url":"https://repository.dl.itc.u-tokyo.ac.jp/record/18176/files/sk049012001.pdf"},"version_id":"121d3d9a-10f6-4fba-9279-3d2f220013b2"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"特集1 : 研究解説 : 高アスペクト比マイクロ構造の製作法","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"特集1 : 研究解説 : 高アスペクト比マイクロ構造の製作法"}]},"item_type_id":"4","owner":"1","path":["1193","1195"],"pubdate":{"attribute_name":"公開日","attribute_value":"2013-02-15"},"publish_date":"2013-02-15","publish_status":"0","recid":"18176","relation_version_is_last":true,"title":["特集1 : 研究解説 : 高アスペクト比マイクロ構造の製作法"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-19T03:57:07.300978+00:00"}