@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018179,
 author = {Toshiyoshi, Hiroshi and Mita, Yoshio and Ogawa, Minoru and Fujita, Hiroyuki},
 issue = {12},
 journal = {生産研究},
 month = {Dec},
 note = {小特集 マイクロマシン},
 pages = {612--614},
 title = {特集4 : 研究速報 : Micro Electrical Connectors by Silicon Anisotropic Etching},
 volume = {49},
 year = {1997}
}