@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018180,
 author = {Fukuda, Satoshi and Saya, Daisuke and Labachelerie, Michel de and Kawakatsu, Hideki},
 issue = {12},
 journal = {生産研究},
 month = {Dec},
 note = {小特集 マイクロマシン},
 pages = {615--616},
 title = {特集5 : 研究速報 : A Positionner for Local Probing of Three Dimensional Nanometric Features in a Scanning Electron Microscope},
 volume = {49},
 year = {1997}
}