@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018182, author = {Saya, Daisuke and Labachelerie, Michel de and Hoummady, Moussa and Kawakatsu, Hideki}, issue = {12}, journal = {生産研究}, month = {Dec}, note = {小特集 マイクロマシン}, pages = {619--622}, title = {特集7 : 研究速報 : Morphological Changes and Mechanical Properties of Thermally Fabricated Nanometric Oscillators}, volume = {49}, year = {1997} }