@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018183, author = {Hoummady, Moussa and Farnault, Etienne and Fujita, Hiroyuki and Masuzawa, Takahisa}, issue = {12}, journal = {生産研究}, month = {Dec}, note = {小特集 マイクロマシン}, pages = {623--625}, title = {特集8 : 研究速報 : Trends in Nanoscale Science and Technology : Nanocantilever Fabrication, Force Gradients and Local Elasticity Measurement}, volume = {49}, year = {1997} }