@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018184,
 author = {Hoummady, Moussa and Farnault, Etienne and Fujita, Hiroyuki and Masuzawa, Takahisa},
 issue = {12},
 journal = {生産研究},
 month = {Dec},
 note = {小特集 マイクロマシン},
 pages = {626--628},
 title = {特集9 : 研究速報 : Trends in Nanoscale Science and Technology : Characterization of Thin Film Mechanical Properties},
 volume = {49},
 year = {1997}
}