@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018347, author = {平本, 俊郎}, issue = {11}, journal = {生産研究}, month = {Nov}, pages = {568--569}, title = {調査報告 : VLSI用薄膜SOI CMOSデバイスに関する研究動向調査}, volume = {48}, year = {1996} }