@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018627, author = {荒川, 泰彦}, issue = {11}, journal = {生産研究}, month = {Nov}, pages = {571--580}, title = {生研公開講演 : ナノテクノロジーと先端デバイス}, volume = {46}, year = {1994} }