@article{oai:repository.dl.itc.u-tokyo.ac.jp:00018662, author = {BLEULER, Hannes}, issue = {7}, journal = {生産研究}, month = {Jul}, note = {小特集 マイクロメカトロニクス研究グループ}, pages = {368--372}, title = {特集1 : 研究解説 : Levitation Types for Microsystems}, volume = {46}, year = {1994} }