@article{oai:repository.dl.itc.u-tokyo.ac.jp:00019417, author = {KAWAKATSU, Hideki and HIGUCHI, Tashiro}, issue = {6}, journal = {生産研究}, month = {Jun}, pages = {548--551}, title = {研究速報 : A Dual-Tunneling-Unit STM : application as a nm order measuring machine and a positioning table}, volume = {41}, year = {1989} }