@article{oai:repository.dl.itc.u-tokyo.ac.jp:00019580, author = {ITOH, Masahide and ENDO, Akira and KURODA, Kazuo and WATANABE, Shuntaro and OGURA, Iwao}, issue = {9}, journal = {生産研究}, month = {Sep}, pages = {433--436}, title = {研究速報 : RELATIONSHIP BETWEEN OPTICAL DAMAGE THRESHOLD AND RESIDUAL ABSORPTION IN EXCIMER LASER COMPONENTS}, volume = {40}, year = {1988} }