@article{oai:repository.dl.itc.u-tokyo.ac.jp:00019649,
 author = {山本, 英夫 and 野村, 剛志},
 issue = {3},
 journal = {生産研究},
 month = {Mar},
 pages = {171--174},
 title = {研究速報 : 熱CVD法で生成した窒化珪素超微粒子の高温静電捕集},
 volume = {40},
 year = {1988}
}