{"created":"2021-03-01T06:37:14.294225+00:00","id":19749,"links":{},"metadata":{"_buckets":{"deposit":"e98bea2a-4b2b-411e-a945-ed6015487816"},"_deposit":{"id":"19749","owners":[],"pid":{"revision_id":0,"type":"depid","value":"19749"},"status":"published"},"_oai":{"id":"oai:repository.dl.itc.u-tokyo.ac.jp:00019749","sets":["171:1108:1448:1462","9:504:1111:1450:1463"]},"item_4_alternative_title_1":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Noncontact Surface Profile Measurement for Ultra Precision Machining"}]},"item_4_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1987-06-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6","bibliographicPageEnd":"208","bibliographicPageStart":"201","bibliographicVolumeNumber":"39","bibliographic_titles":[{"bibliographic_title":"生産研究"}]}]},"item_4_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"超精密加工面の表面微細形状を光学装置、走査電子顕微鏡を用いて非接触測定する方法の現状について概観した。対象表面の微細形状は数nmないし10nm台の精度が要求されている。光学的方法としては、各種の干渉法、光挺子法等と差動増幅法の組み合わせ等による方法が示されている。一方電子顕微鏡を用いる方法は試料表面を観察する画像を構成している信号の処理によって、微細形状を求める方法が提示されている。それぞれに特徴があるが、所要の精度測定の道が開けつつある状況について解説している。","subitem_description_type":"Abstract"}]},"item_4_description_6":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"特集　生産・加工システムの最適化","subitem_description_type":"Other"}]},"item_4_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"37644","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Sato, Hisayoshi"}]}]},"item_4_publisher_20":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"東京大学生産技術研究所"}]},"item_4_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00127075","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0037105X","subitem_source_identifier_type":"ISSN"}]},"item_4_subject_15":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"500","subitem_subject_scheme":"NDC"}]},"item_4_text_21":{"attribute_name":"出版者別名","attribute_value_mlt":[{"subitem_text_value":"Institute of Industrial Science, the University of Tokyo"}]},"item_4_text_4":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東京大学生産技術研究所第2部 工作システム工'-lil:"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"佐藤, 壽芳"}],"nameIdentifiers":[{"nameIdentifier":"37643","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-06-08"}],"displaytype":"detail","filename":"sk039006002.pdf","filesize":[{"value":"719.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"sk039006002.pdf","url":"https://repository.dl.itc.u-tokyo.ac.jp/record/19749/files/sk039006002.pdf"},"version_id":"ae7fcee7-7294-4821-9806-71efe1c2a5ad"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"特集1 : 研究解説 : 超精密非接触表面形状測定法について","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"特集1 : 研究解説 : 超精密非接触表面形状測定法について"}]},"item_type_id":"4","owner":"1","path":["1462","1463"],"pubdate":{"attribute_name":"公開日","attribute_value":"2011-01-11"},"publish_date":"2011-01-11","publish_status":"0","recid":"19749","relation_version_is_last":true,"title":["特集1 : 研究解説 : 超精密非接触表面形状測定法について"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-19T03:53:33.850668+00:00"}