{"created":"2021-03-01T06:37:14.612403+00:00","id":19754,"links":{},"metadata":{"_buckets":{"deposit":"9a4fe648-0723-4f37-ad71-71b8dc15cfc1"},"_deposit":{"id":"19754","owners":[],"pid":{"revision_id":0,"type":"depid","value":"19754"},"status":"published"},"_oai":{"id":"oai:repository.dl.itc.u-tokyo.ac.jp:00019754","sets":["171:1108:1448:1462","9:504:1111:1450:1463"]},"item_4_alternative_title_1":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"High-Efficiency Fine Finishing Using 'Liquid-Bonded Wheel '"}]},"item_4_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1987-06-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"6","bibliographicPageEnd":"236","bibliographicPageStart":"231","bibliographicVolumeNumber":"39","bibliographic_titles":[{"bibliographic_title":"生産研究"}]}]},"item_4_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"液体ボンド砥石は、微細な砥粒を液体の表面張力により結合したもので、硬脆材料の鏡面研磨を目的として開発した非常に柔らかいラッピング砥石である。本報告では、この液体ポンド砥石の構造や特徴について解説するとともに、その特徴を生かして高加工圧にて研磨を行う方法について述べ、さらに高加工圧領域での硬脆材料であるシリコンウエハやセラミックスに対する研磨特性について解説する","subitem_description_type":"Abstract"}]},"item_4_description_6":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"特集　生産・加工システムの最適化","subitem_description_type":"Other"}]},"item_4_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"37659","nameIdentifierScheme":"WEKO"}],"names":[{"name":"TANI, Yasuhiro"}]},{"nameIdentifiers":[{"nameIdentifier":"37660","nameIdentifierScheme":"WEKO"}],"names":[{"name":"KAWADA, Kenji"}]}]},"item_4_publisher_20":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"東京大学生産技術研究所"}]},"item_4_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AN00127075","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0037105X","subitem_source_identifier_type":"ISSN"}]},"item_4_subject_15":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"530","subitem_subject_scheme":"NDC"}]},"item_4_text_21":{"attribute_name":"出版者別名","attribute_value_mlt":[{"subitem_text_value":"Institute of Industrial Science, the University of Tokyo"}]},"item_4_text_4":{"attribute_name":"著者所属","attribute_value_mlt":[{"subitem_text_value":"東京大学生産技術研究所第2部 工作機械測定工学"},{"subitem_text_value":"東京大学生産技術研究所第2部 工業化学"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"谷, 泰弘"}],"nameIdentifiers":[{"nameIdentifier":"37657","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"河田, 研治"}],"nameIdentifiers":[{"nameIdentifier":"37658","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-06-08"}],"displaytype":"detail","filename":"sk039006007.pdf","filesize":[{"value":"584.8 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"sk039006007.pdf","url":"https://repository.dl.itc.u-tokyo.ac.jp/record/19754/files/sk039006007.pdf"},"version_id":"83f588d2-81f7-46b4-918d-3bb11e25950b"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"特集6 : 研究解説 : 液体ボンド砥石を用いた高能率研磨法","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"特集6 : 研究解説 : 液体ボンド砥石を用いた高能率研磨法"}]},"item_type_id":"4","owner":"1","path":["1462","1463"],"pubdate":{"attribute_name":"公開日","attribute_value":"2011-01-11"},"publish_date":"2011-01-11","publish_status":"0","recid":"19754","relation_version_is_last":true,"title":["特集6 : 研究解説 : 液体ボンド砥石を用いた高能率研磨法"],"weko_creator_id":"1","weko_shared_id":null},"updated":"2022-12-19T03:53:31.336298+00:00"}