@article{oai:repository.dl.itc.u-tokyo.ac.jp:00019782, author = {仙波, 卓弥 and 谷, 泰弘 and 佐藤, 壽芳}, issue = {4}, journal = {生産研究}, month = {Apr}, pages = {145--148}, title = {研究速報 : 超音波顕微鏡による加工変質層の定量評価}, volume = {39}, year = {1987} }