@mastersthesis{oai:repository.dl.itc.u-tokyo.ac.jp:02005521, author = {小笠原, 誠}, month = {Mar}, note = {学位の種別: 修士}, school = {東京大学, The University of Tokyo}, title = {シリコン高屈折率差格子を用いた垂直入射型高速光変調器}, year = {2020} }