@article{oai:repository.dl.itc.u-tokyo.ac.jp:00020202, author = {MASUZAWA, Takahisa and TSUCHIYA, Ichiro}, issue = {2}, journal = {生産研究}, month = {Feb}, note = {特集 生産・加工システムの最適化}, pages = {97--100}, title = {特集10 : 研究速報 : Low-Energy High-Current Ion Source for Ion-Shower Applications}, volume = {36}, year = {1984} }