{"_buckets": {"deposit": "5f528543-6e50-411e-b509-e4febbe89b58"}, "_deposit": {"id": "20612", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "20612"}, "status": "published"}, "_oai": {"id": "oai:repository.dl.itc.u-tokyo.ac.jp:00020612"}, "item_4_alternative_title_1": {"attribute_name": "\u305d\u306e\u4ed6\u306e\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_alternative_title": "Ion-Beam-Induced-Current (IBIC) Monitoring of Uniform and Selective lon-Etching Processes ln Layered Structures\uff081\uff09"}]}, "item_4_biblio_info_7": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1980-11-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "11", "bibliographicPageEnd": "543", "bibliographicPageStart": "540", "bibliographicVolumeNumber": "32", "bibliographic_titles": [{"bibliographic_title": "\u751f\u7523\u7814\u7a76"}]}]}, "item_4_description_6": {"attribute_name": "\u5185\u5bb9\u8a18\u8ff0", "attribute_value_mlt": [{"subitem_description": "\u7279\u96c6\uff1a\u751f\u7523\u30fb\u52a0\u5de5\u30b7\u30b9\u30c6\u30e0\u306e\u6700\u9069\u5316", "subitem_description_type": "Other"}]}, "item_4_full_name_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "41524", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Sakaki, Hiroyuki"}]}, {"nameIdentifiers": [{"nameIdentifier": "41525", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Yokoyama, Koji"}]}, {"nameIdentifiers": [{"nameIdentifier": "41526", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Sekiguchi, Yoshinobu"}]}, {"nameIdentifiers": [{"nameIdentifier": "41527", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Imai, Yuji"}]}]}, "item_4_publisher_20": {"attribute_name": "\u51fa\u7248\u8005", "attribute_value_mlt": [{"subitem_publisher": "\u6771\u4eac\u5927\u5b66\u751f\u7523\u6280\u8853\u7814\u7a76\u6240"}]}, "item_4_source_id_10": {"attribute_name": "\u66f8\u8a8c\u30ec\u30b3\u30fc\u30c9ID", "attribute_value_mlt": [{"subitem_source_identifier": "AN00127075", "subitem_source_identifier_type": "NCID"}]}, "item_4_source_id_8": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0037105X", "subitem_source_identifier_type": "ISSN"}]}, "item_4_subject_15": {"attribute_name": "\u65e5\u672c\u5341\u9032\u5206\u985e\u6cd5", "attribute_value_mlt": [{"subitem_subject": "530", "subitem_subject_scheme": "NDC"}]}, "item_4_text_21": {"attribute_name": "\u51fa\u7248\u8005\u5225\u540d", "attribute_value_mlt": [{"subitem_text_value": "Institute of Industrial Science, the University of Tokyo"}]}, "item_4_text_34": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"subitem_text_value": "Departmental Bulletin Paper"}]}, "item_4_text_4": {"attribute_name": "\u8457\u8005\u6240\u5c5e", "attribute_value_mlt": [{"subitem_text_value": "\u6771\u4eac\u5927\u5b66\u751f\u7523\u6280\u8853\u7814\u7a76\u6240\u7b2c3\u90e8 \u8d85\u77ed\u6ce2\u5de5\u5b66"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u698a, \u88d5\u4e4b"}], "nameIdentifiers": [{"nameIdentifier": "41520", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u6a2a\u5c71, \u5e78\u55e3"}], "nameIdentifiers": [{"nameIdentifier": "41521", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u95a2\u53e3, \u82b3\u4fe1"}], "nameIdentifiers": [{"nameIdentifier": "41522", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "\u4eca\u4e95, \u52c7\u6b21"}], "nameIdentifiers": [{"nameIdentifier": "41523", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-06-08"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "sk032011008.pdf", "filesize": [{"value": "371.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 371300.0, "url": {"label": "sk032011008.pdf", "url": "https://repository.dl.itc.u-tokyo.ac.jp/record/20612/files/sk032011008.pdf"}, "version_id": "7f59c85f-ef64-4468-af85-fe6d105cdb5e"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "\u7279\u96c68 : \u7814\u7a76\u901f\u5831 : \u30a4\u30aa\u30f3\u7dda\u8a98\u8d77\u96fb\u6d41(IBIC)\u3092\u7528\u3044\u305f\u30a4\u30aa\u30f3 \uff65\u30a8\u30c3\u30c1\u30f3\u30b0\u904e\u7a0b\u306e\u65b0\u3057\u3044\u30e2\u30cb\u30bf\u4e00\u6cd5\uff081\uff09", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "\u7279\u96c68 : \u7814\u7a76\u901f\u5831 : \u30a4\u30aa\u30f3\u7dda\u8a98\u8d77\u96fb\u6d41(IBIC)\u3092\u7528\u3044\u305f\u30a4\u30aa\u30f3 \uff65\u30a8\u30c3\u30c1\u30f3\u30b0\u904e\u7a0b\u306e\u65b0\u3057\u3044\u30e2\u30cb\u30bf\u4e00\u6cd5\uff081\uff09"}]}, "item_type_id": "4", "owner": "1", "path": ["171/1108/1628/1632", "9/504/1111/1630/1633"], "permalink_uri": "http://hdl.handle.net/2261/37629", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2010-10-28"}, "publish_date": "2010-10-28", "publish_status": "0", "recid": "20612", "relation": {}, "relation_version_is_last": true, "title": ["\u7279\u96c68 : \u7814\u7a76\u901f\u5831 : \u30a4\u30aa\u30f3\u7dda\u8a98\u8d77\u96fb\u6d41(IBIC)\u3092\u7528\u3044\u305f\u30a4\u30aa\u30f3 \uff65\u30a8\u30c3\u30c1\u30f3\u30b0\u904e\u7a0b\u306e\u65b0\u3057\u3044\u30e2\u30cb\u30bf\u4e00\u6cd5\uff081\uff09"], "weko_shared_id": null}