@article{oai:repository.dl.itc.u-tokyo.ac.jp:00021042,
 author = {横溝, 氾 and 徳田, 博邦 and 安達, 芳夫 and 生駒, 俊明},
 issue = {8},
 journal = {生産研究},
 month = {Aug},
 note = {application/pdf},
 pages = {413--421},
 title = {研究解説 : 化合物半導体の表面不活性化技術},
 volume = {29},
 year = {1977}
}