@article{oai:repository.dl.itc.u-tokyo.ac.jp:00021409, author = {六戸部, 豊信 and 明石, 和夫}, issue = {9}, journal = {生産研究}, month = {Sep}, note = {application/pdf}, pages = {346--350}, title = {研究速報 : 高周波プラズマの数値解析}, volume = {26}, year = {1974} }