@article{oai:repository.dl.itc.u-tokyo.ac.jp:00022177, author = {張, 碧雄 and 大島, 康次郎}, issue = {1}, journal = {生産研究}, month = {Jan}, note = {application/pdf}, pages = {31--32}, title = {研究速報 : 微小パターン位置決め方式}, volume = {21}, year = {1969} }