@article{oai:repository.dl.itc.u-tokyo.ac.jp:00022210,
 author = {富永, 五郎},
 issue = {10},
 journal = {生産研究},
 month = {Oct},
 note = {application/pdf},
 pages = {479--485},
 title = {極高真空技術の現状},
 volume = {20},
 year = {1968}
}