@article{oai:repository.dl.itc.u-tokyo.ac.jp:00049572,
 author = {TOSHIYOSHI, Hiroshi and JOHN, SU  Guo-Dung and LACOSSE, Jason and WU, C. WU},
 issue = {2},
 journal = {生産研究},
 month = {Feb},
 note = {マイクロマシン特集号},
 pages = {91--95},
 title = {研究解説 : Micro Optical Scanners of Photoresist Reflow Lens on MEMS XY-Stage},
 volume = {53},
 year = {2001}
}