@article{oai:repository.dl.itc.u-tokyo.ac.jp:00049580,
 author = {LEBRASSEUR, Eric and BOUROUINA, Tarik and POURCIEL, Jean-Bernard and OZAKI, Munekatsu and MASUZAWA, Takahisa and FUJITA, Hiroyuki},
 issue = {2},
 journal = {生産研究},
 month = {Feb},
 note = {マイクロマシン特集号},
 pages = {123--126},
 title = {研究解説 : Resonant-type Micro-probe for Vertical Profiler},
 volume = {53},
 year = {2001}
}