@article{oai:repository.dl.itc.u-tokyo.ac.jp:00049582,
 author = {FUKUSHIMA, Kimitake and SAYA, Daisuke and KAWAKATSU, Hideki},
 issue = {2},
 journal = {生産研究},
 month = {Feb},
 note = {マイクロマシン特集号},
 pages = {131--134},
 title = {研究解説 : SEM-AFM for 3D Nano-Structure Measurement},
 volume = {53},
 year = {2001}
}