@article{oai:repository.dl.itc.u-tokyo.ac.jp:00049583,
 author = {SAYA, Daisuke and FUKUSHIMA, Kimitake and HIROSHI, Toshiyuki and HASHIGUCHI, Gen and FUJITA, Hiroyuki and KAWAKATSU, Hideki},
 issue = {2},
 journal = {生産研究},
 month = {Feb},
 note = {マイクロマシン特集号},
 pages = {135--138},
 title = {研究解説 : Fabrication of Nanometric Oscillators},
 volume = {53},
 year = {2001}
}