@article{oai:repository.dl.itc.u-tokyo.ac.jp:00049705,
 author = {Kim, Beomjoon and Kim, Gyuman and Brugger, Juergen},
 issue = {2},
 journal = {生産研究},
 month = {},
 note = {特集 マイクロ・ナノメカトロニクス},
 pages = {125--128},
 title = {研究解説 : Microstructures and Microfabrication using Thick Photo Resist},
 volume = {54},
 year = {2002}
}