@article{oai:repository.dl.itc.u-tokyo.ac.jp:00049707, author = {Collard, Dominique and Buchaillot, Lionel}, issue = {2}, journal = {生産研究}, month = {}, note = {特集 マイクロ・ナノメカトロニクス}, pages = {135--139}, title = {研究解説 : Microsystem for Telecommunication}, volume = {54}, year = {2002} }