@misc{oai:repository.dl.itc.u-tokyo.ac.jp:00051908, author = {菅家, 智一}, month = {Mar}, note = {学位の種別: 修士}, title = {Fe/Mg/SiOxNy/Si(001)トンネル接合作製技術と Siへのスピン注入}, year = {2018} }