@article{oai:repository.dl.itc.u-tokyo.ac.jp:00053516, author = {CHAPUIS, Yves-Andre and FUKUTA, Yamato and MITA, Yoshio and FUJITA, Hiroyuki}, issue = {1}, journal = {生産研究}, month = {}, note = {特集2 日仏マイクロメカトロニクス国際共同研究組織(LIMMS)}, pages = {109--115}, title = {研究速報 : Autonomous decentralized systems based on ditributed conrolled MEMS actuator for micro conveyance application}, volume = {56}, year = {2004} }