@article{oai:repository.dl.itc.u-tokyo.ac.jp:00000589, author = {Noda, Suguru and Kajikawa, Yuya and Komiyama, Hiroshi}, issue = {1-4}, journal = {Applied surface science : a journal devoted to the properties of interfaces in relation to the synthesis and behaviour of materials}, month = {Mar}, pages = {372--379}, title = {Combinatorial masked deposition: Simple method to control deposition flux and its spatial distribution}, volume = {225}, year = {2004} }