@article{oai:repository.dl.itc.u-tokyo.ac.jp:00000929, author = {Matsui, Makoto and Komurasaki, Kimiya and Arakawa, Yoshihiro}, issue = {1-4}, journal = {Vacuum}, month = {Sep}, pages = {21--24}, title = {Sensitivity Enhancement of Laser Absorption Spectroscopy for Atomic Oxygen Measurement in Microwave Air Plasma}, volume = {83}, year = {2008} }