WEKO3
AND
アイテム
{"_buckets": {"deposit": "2e8e587d-bfa1-42c8-9588-77e191038e06"}, "_deposit": {"id": "1786", "owners": [], "pid": {"revision_id": 0, "type": "depid", "value": "1786"}, "status": "published"}, "_oai": {"id": "oai:repository.dl.itc.u-tokyo.ac.jp:00001786"}, "item_7_biblio_info_7": {"attribute_name": "\u66f8\u8a8c\u60c5\u5831", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2007-02-02", "bibliographicIssueDateType": "Issued"}, "bibliographic_titles": [{}]}]}, "item_7_date_granted_25": {"attribute_name": "\u5b66\u4f4d\u6388\u4e0e\u5e74\u6708\u65e5", "attribute_value_mlt": [{"subitem_dategranted": "2007-03"}]}, "item_7_full_name_3": {"attribute_name": "\u8457\u8005\u5225\u540d", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "5570", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "Yonemitsu, Hiroki"}]}]}, "item_7_select_21": {"attribute_name": "\u5b66\u4f4d", "attribute_value_mlt": [{"subitem_select_item": "master"}]}, "item_7_subject_13": {"attribute_name": "\u65e5\u672c\u5341\u9032\u5206\u985e\u6cd5", "attribute_value_mlt": [{"subitem_subject": "549", "subitem_subject_scheme": "NDC"}]}, "item_7_text_24": {"attribute_name": "\u7814\u7a76\u79d1\u30fb\u5c02\u653b", "attribute_value_mlt": [{"subitem_text_value": "\u5de5\u5b66\u7cfb\u7814\u7a76\u79d1\u96fb\u5b50\u5de5\u5b66\u5c02\u653b"}]}, "item_7_text_27": {"attribute_name": "\u5b66\u4f4d\u8a18\u756a\u53f7", "attribute_value_mlt": [{"subitem_text_value": "\u4fee\u7b2c\u53f7"}]}, "item_7_text_36": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"subitem_text_value": "Thesis"}]}, "item_7_text_4": {"attribute_name": "\u8457\u8005\u6240\u5c5e", "attribute_value_mlt": [{"subitem_text_value": "\u6771\u4eac\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7cfb\u7814\u7a76\u79d1 \u96fb\u5b50\u5de5\u5b66\u5c02\u653b"}]}, "item_creator": {"attribute_name": "\u8457\u8005", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "\u7c73\u6e80, \u5e83\u6a39"}], "nameIdentifiers": [{"nameIdentifier": "5569", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "\u30d5\u30a1\u30a4\u30eb\u60c5\u5831", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-05-31"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "yonemitsu.pdf", "filesize": [{"value": "2.4 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 2400000.0, "url": {"label": "yonemitsu.pdf", "url": "https://repository.dl.itc.u-tokyo.ac.jp/record/1786/files/yonemitsu.pdf"}, "version_id": "04778123-d9ec-4f0b-b59a-2dffba781e9b"}]}, "item_keyword": {"attribute_name": "\u30ad\u30fc\u30ef\u30fc\u30c9", "attribute_value_mlt": [{"subitem_subject": "\u5149\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u8fd1\u63a5\u5834\u5149", "subitem_subject_scheme": "Other"}, {"subitem_subject": "\u975e\u65ad\u71b1\u5149\u5316\u5b66\u53cd\u5fdc", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "\u8a00\u8a9e", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "\u8cc7\u6e90\u30bf\u30a4\u30d7", "attribute_value_mlt": [{"resourcetype": "thesis", "resourceuri": "http://purl.org/coar/resource_type/c_46ec"}]}, "item_title": "\u975e\u65ad\u71b1\u904e\u7a0b\u3092\u5229\u7528\u3057\u305f\u8fd1\u63a5\u5834\u5149\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u305d\u306e\u5fdc\u7528", "item_titles": {"attribute_name": "\u30bf\u30a4\u30c8\u30eb", "attribute_value_mlt": [{"subitem_title": "\u975e\u65ad\u71b1\u904e\u7a0b\u3092\u5229\u7528\u3057\u305f\u8fd1\u63a5\u5834\u5149\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u305d\u306e\u5fdc\u7528"}]}, "item_type_id": "7", "owner": "1", "path": ["9/233/234", "6/260/261"], "permalink_uri": "http://hdl.handle.net/2261/25822", "pubdate": {"attribute_name": "\u516c\u958b\u65e5", "attribute_value": "2011-08-08"}, "publish_date": "2011-08-08", "publish_status": "0", "recid": "1786", "relation": {}, "relation_version_is_last": true, "title": ["\u975e\u65ad\u71b1\u904e\u7a0b\u3092\u5229\u7528\u3057\u305f\u8fd1\u63a5\u5834\u5149\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u305d\u306e\u5fdc\u7528"], "weko_shared_id": null}
非断熱過程を利用した近接場光リソグラフィとその応用
http://hdl.handle.net/2261/25822
f9025361-aee3-4e8c-96ec-24e82daec17f
名前 / ファイル | ライセンス | アクション | |
---|---|---|---|
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2011-08-08 | |||||
タイトル | ||||||
タイトル | 非断熱過程を利用した近接場光リソグラフィとその応用 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題 | 光リソグラフィ | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | 近接場光 | |||||
主題Scheme | Other | |||||
キーワード | ||||||
主題 | 非断熱光化学反応 | |||||
主題Scheme | Other | |||||
資源タイプ | ||||||
資源 | http://purl.org/coar/resource_type/c_46ec | |||||
タイプ | thesis | |||||
著者 |
米満, 広樹
× 米満, 広樹 |
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著者別名 | ||||||
識別子 | ||||||
識別子 | 5570 | |||||
識別子Scheme | WEKO | |||||
姓名 | ||||||
姓名 | Yonemitsu, Hiroki | |||||
著者所属 | ||||||
著者所属 | 東京大学大学院工学系研究科 電子工学専攻 | |||||
書誌情報 | 発行日 2007-02-02 | |||||
日本十進分類法 | ||||||
主題 | 549 | |||||
主題Scheme | NDC | |||||
学位 | ||||||
値 | master | |||||
研究科・専攻 | ||||||
工学系研究科電子工学専攻 | ||||||
学位授与年月日 | ||||||
学位授与年月日 | 2007-03 | |||||
学位記番号 | ||||||
修第号 |