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  1. 113 工学系研究科・工学部
  2. 21 電子工学専攻
  3. 1132225 修士論文(電子工学専攻)
  1. 0 資料タイプ別
  2. 20 学位論文
  3. 025 修士論文

III/V族化合物半導体MOVPEにおける界面急峻化に向けた表面in situ観察と速度過程解析

http://hdl.handle.net/2261/29067
438d7d1b-e2c6-4d04-b630-fdebcf255115
名前 / ファイル ライセンス アクション
37066483.pdf 37066483.pdf (4.9 MB)
Item type 学位論文 / Thesis or Dissertation(1)
公開日 2011-08-08
タイトル
タイトル III/V族化合物半導体MOVPEにおける界面急峻化に向けた表面in situ観察と速度過程解析
言語
言語 jpn
キーワード
主題 MOVPE
主題Scheme Other
キーワード
主題 化合物半導体
主題Scheme Other
資源タイプ
資源 http://purl.org/coar/resource_type/c_46ec
タイプ thesis
その他のタイトル
その他のタイトル In situ surface observation and kinetic analysis for abrupt hetero-interfaces in MOVPE of III/V compound semiconductors
著者 出浦, 桃子

× 出浦, 桃子

WEKO 5798

出浦, 桃子

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著者別名
識別子
識別子 5799
識別子Scheme WEKO
姓名
姓名 デウラ, モモコ
著者所属
著者所属 東京大学大学院工学系研究科 電子工学専攻
著者所属
著者所属 Department of Electronic Engineering, The University of Tokyo
書誌情報 発行日 2008-03-24
日本十進分類法
主題 549
主題Scheme NDC
学位名
学位名 修士(工学)
学位
値 master
研究科・専攻
工学系研究科電子工学専攻
学位授与年月日
学位授与年月日 2008-03-24
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