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  1. 122 新領域創成科学研究科
  2. 11 基盤科学研究系 物質系専攻
  3. 1221125 修士論文(基盤科学研究系物質系専攻)
  1. 0 資料タイプ別
  2. 20 学位論文
  3. 025 修士論文

Application of Cryoplasma to Ashing Process (summary)

http://hdl.handle.net/2261/52262
492ae9d1-edec-4979-ac3b-a011dfc0eb17
名前 / ファイル ライセンス アクション
K-03135-a.pdf 要旨(summary) (1.7 MB)
Item type 学位論文 / Thesis or Dissertation(1)
公開日 2012-10-10
タイトル
タイトル Application of Cryoplasma to Ashing Process (summary)
言語
言語 eng
キーワード
主題 Cryoplasma
主題Scheme Other
キーワード
主題 ashing
主題Scheme Other
キーワード
主題 photoresist
主題Scheme Other
キーワード
主題 low-κ materials
主題Scheme Other
キーワード
主題 RC delay
主題Scheme Other
資源タイプ
資源 http://purl.org/coar/resource_type/c_46ec
タイプ thesis
その他のタイトル
その他のタイトル クライオプラズマのアッシングプロセスへの応用(要旨)
著者 Mori, Shusaku

× Mori, Shusaku

WEKO 8302

Mori, Shusaku

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著者別名
識別子
識別子 8303
識別子Scheme WEKO
姓名
姓名 森, 周作
著者所属
著者所属 東京大学大学院新領域創成科学研究科基盤科学研究系物質系専攻
著者所属
著者所属 Department of Adcanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo
書誌情報 発行日 2012-03-22
日本十進分類法
主題 427
主題Scheme NDC
学位名
学位名 修士(科学)
学位
値 master
研究科・専攻
新領域創成科学研究科基盤科学研究系物質系専攻
学位授与年月日
学位授与年月日 2012-03-22
学位記番号
修創域第4149号
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