WEKO3
アイテム
フェーズドアレイを用いたInPオフチップ光偏向素子の研究
http://hdl.handle.net/2261/55403
http://hdl.handle.net/2261/55403cec9e1a0-7cad-40a2-8d55-00b38b5053f2
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
37116504.pdf (5.4 MB)
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| Item type | 学位論文 / Thesis or Dissertation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2013-10-02 | |||||
| タイトル | ||||||
| タイトル | フェーズドアレイを用いたInPオフチップ光偏向素子の研究 | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源 | http://purl.org/coar/resource_type/c_46ec | |||||
| タイプ | thesis | |||||
| その他のタイトル | ||||||
| その他のタイトル | Research on InP Off-Chip Optical Beam Steering Devices Using Phased Arrays | |||||
| 著者 |
崔, 成漢
× 崔, 成漢 |
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| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 11339 | |||||
| 姓名 | Choi, Sunghan | |||||
| 著者所属 | ||||||
| 著者所属 | 東京大学大学院工学系研究科電気系工学専攻 | |||||
| 著者所属 | ||||||
| 著者所属 | Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo | |||||
| Abstract | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Optical beam steering devices, which control the propagation direction of light, have diverse applications, including LIDAR (Light Detection and Ranging), optical wireless communication, optical imaging, and sensing. In all applications, there have been growing demands for smaller device size, faster scanning speed, and lower power consumption. Among various types of optical beam steering devices, phased-array InP optical beam steering devices have several advantages, such as compact size, fast steering speed above few hundred MHz, and integratability with laser diodes. On the other hand, InP/InGaAsP waveguide device in general suffers from a difficulty in extracting the light out of the plane efficiently, due to the relatively small refractive index difference between InP and InGaAsP. In this research, we aim to realize efficient and compact phased-array optical beam steering devices on InP. This work consists of two parts. We first design, fabricate, and demonstrate one-dimensional (1D) optical beam steering device circuits on InP. Then, we develop a novel type of vertical optical coupler having a slanted mirror, which could be used to realize truly two-dimensional beam-steering. The 1D optical beam steering devices are designed based on the concept of phased array, and its characteristics are calculated by using the beam-propagation method. The designed devices are fabricated by the standard III-V semiconductor optical device process. A far-field optical measurement setup is newly built to characterize the beam-steering function of the fabricated devices. We experimentally demonstrate large steering angle of ±28 degree as well as low wavelength dependency over wide wavelength range from 1530 nm to 1570 nm. The vertical optical coupler, having a slanted mirror, is designed by using the eigenmode expansion method. The designed optical coupler is then fabricated by C12/Ar reactive-ion-etching process with the use of two newly developed Al stages. Using the fabricated structure, we demonstrate efficient vertical coupling with the fiber-to-fiber loss as low as 13.3 dB. We expect that by integrating the demonstrated coupler structure with the above-mentioned optical beam steering device chip, we could realize wide ranges of vertically emitting beam-steering devices, including the two-dimensional (2D) beam scanners. | |||||
| 書誌情報 | 発行日 2013-03-25 | |||||
| 学位名 | ||||||
| 学位名 | 修士(工学) | |||||
| 学位 | ||||||
| 値 | master | |||||
| 研究科・専攻 | ||||||
| 工学系研究科・電気系工学専攻 | ||||||
| 学位授与年月日 | ||||||
| 学位授与年月日 | 2013-03-25 | |||||
